摘要
蓝宝石衬底在实际量产中,约10%~15%会产生表面缺陷,导致成品返工或报废,经济损失较大。分析实际量产作业中设备与工艺过程,探究和比较刮伤、坑洞、气泡、颗粒、崩角、色差共6种表面缺陷的失效模式,提出了技术和工艺改善措施。在检测方式上,对比了接触式及非接触式检测工具与原理,探讨了各自的分辨率与呈现方式,为得到更有效的改善技术和工艺奠定了基础。过程改进后,量产作业表面缺陷占比降低至5%~8%。若要实现更低的表面缺陷占比,需进一步改良工艺过程和机台硬件配置。
In the actual mass production of sapphire substrate, about 10%~15% of the sapphire substrate will produce surface defects, resulting in rework or scrap of finished products, and thus resulting in economic losses. The equipment and process in the actual mass production operation are analyzed, the failure modes of 6 surface defects including scratch, pits, bubbles, particle, chipping and color defect are investigated and compared, and the technological and process improvement measures are put forward. In the detection method, the contact and non-contact detection tools and principles are compared, and their resolution and presentation are discussed, laying a foundation for a more effective improvement of technology and process. After process improvement, the percentage of surface defects in mass production decreased to 5%~8%. In order to achieve lower surface defects, it is necessary to further improve the process and machine hardware configuration.
作者
刘建飞
周志豪
吴丽琼
黄建烽
LIU Jian-fei;ZHOU Zhi-hao;WU Li-qiong;HUANG Jian-feng(Fujian Jingan Optoelectronics Co.,Ltd.,Quanzhou 362411,China)
出处
《工业技术创新》
2020年第3期52-56,共5页
Industrial Technology Innovation
关键词
蓝宝石衬底
表面缺陷
量产
失效模式
接触式检测
非接触式检测
Sapphire Substrate
Surface Defect
Mass Production
Failure Mode
Contact Detection
Noncontact Detection
