摘要
针对由多个单自由度累加而成的多自由度平台存在误差累积精度难提高的局限性,提出一种基于直线电机驱动的X-Y二维平面运动平台。利用1对正交布置的直线轴承进行平面运动解耦,实现二维平面运动;基于直线电机的力学模型,推导平台的基本控制模型;基于平台的非线性阻力,提出一种具有非线性阻尼前馈补偿的PI控制器。研究结果表明:在全行程(<19 mm)运动过程中,平台在实现平面运动的同时,达到厘米级运动行程和亚微米级运动精度,验证了平台的可靠性和控制器的有效性。
In view of the limitation of multi-degree-of-freedom platform formed by the accumulation of multiple single-degree-of-freedom platforms,an X-Y two-dimensional planar motion platform driven by linear motor was proposed.A pair of orthogonal linear bearings were used to decouple plane motion and realize two-dimensional plane motion.Based on the mechanical model of linear motor,the basic control model of the platform was derived.Based on the nonlinear resistance of the platform,a PI controller with nonlinear damping feedforward compensation was proposed.The results show that when the platform is in full travel(<19 mm)motion,it can realize the plane motion and achieve the design goal of centimeter-scale travel and submicron precision,which verifies the reliability of the platform and the effectiveness of the controller.
作者
张威
周海波
黄珍里
孔志平
段吉安
ZHANG Wei;ZHOU Haibo;HUANG Zhenli;KONG Zhiping;DUAN Ji'an(State Key Laboratory of High-Performance Complex Manufacturing,Central South University,Changsha 410083,China)
出处
《中南大学学报（自然科学版）》
EI
CAS
CSCD
北大核心
2020年第5期1221-1227,共7页
Journal of Central South University:Science and Technology
基金
国家重点研发计划项目(2017YFB1104800)
国家自然科学基金资助项目(51575534,51975590)。
关键词
电子封装
二维精密平台
前馈补偿
electronic packaging
two-dimensional precision platform
feedforward compensation
