摘要
恒温差工作热膜式空气流量计采用衬底集成电阻检测环境温度,并抑制流量信号的温度漂移。但是加热丝的热扩散使得检测到的环境温度偏高,导致空气流量计存在着温度流量耦合效应。空气流量输出信号随环境温度变化,环境温度检测电阻的输出信号随空气流量变化而变化,致使测量存在较大的误差。因此针对空气流量计的温度流量耦合特性,利用多元线性回归方程分别对环境温度检测电阻以及空气流量的输出信号进行补偿,进而采用决定系数评估多元线性回归模型对空气流量计温度流量耦合效应进行补偿。测试结果表明补偿后空气流量温漂、环境温度检测误差分别减小到1.5%和2%以内。
The thermostatic differential working hot-film air flowmeter uses the substrate integrated resistance to detect the ambient temperature and to suppress the temperature drift of the flow signal.However,the thermal diffusion of the heater entails the detected ambient temperature increase,resulting in air flowmeter has the coupling effect of temperature flow.The air flow output signal changes with the ambient temperature,the output signal of ambient temperature detection resistance varies with the change of air flow,resulting in a large error in the measurement.Therefore,according to the coupled characteristics of temperature and flow rate of air flowmeter,multiple linear regression equations were used to compensate the environmental temperature detection resistance and the output signal of air flow rate respectively.The multi-linear regression equation was used to compensate output of the ambient temperature detection resistance and the air flow.Furthermore,the compensation effect of the multiple linear regression model on the air flow temperature flow coupling effect was evaluated by the determination coefficients.The test results show that the air flow temperature drift and the ambient temperature detection error after compensation are reduced to less than 1% and 1.5%,respectively.
作者
王渊
孔延梅
焦斌斌
叶雨欣
云世昌
赖俊桦
陈大鹏
WANG Yuan;KONG Yan-mei;JIAO Bin-bin;YE Yu-xin;YUN Shi-chang;LAI Jun-hua;CHEN Da-peng(Institute of Microelectronics of Chinese Academy of Sciences,Beijing 100029,China;University of Chinese Academy of Sciences,Beijing 100049,China)
出处
《仪表技术与传感器》
CSCD
北大核心
2019年第12期40-44,共5页
Instrument Technique and Sensor
关键词
流量传感器
温度漂移
温度流量耦合效应
算法补偿
flow sensor
temperature drift
coupling effect of temperature and flow
algorithm compensation
