摘要
为了研究聚酰亚胺薄膜在308nm准分子激光下的剥离效果,采用实验研究的方法,分别探究了激光能量密度、光斑重叠率、脉冲频率、衬底温度对激光剥离效果的影响,并结合显微镜观察剥离后的衬底和薄膜形貌。结果表明,激光剥离能量阈值约为160mJ/cm 2,在激光能量密度为180mJ/cm 2~190mJ/cm 2左右、光斑重叠率为68.33%时,剥离效果较好;提高衬底温度有利于激光剥离过程。该研究对聚酰亚胺薄膜在柔性电子领域的工业化应用具有一定意义。
In order to study lift-off effect of polyimide films under 308nm excimer laser irradiation,by means of experimental research,the effects of laser energy density,spot overlap rate,pulse frequency and substrate temperature on laser lift-off were investigated.The morphologies of the stripped substrates and films were observed by microscopy.The results show that,the threshold of laser lift-off energy is about 160mJ/cm 2.When laser energy density is about 180mJ/cm 2~190mJ/cm 2 and spot overlap rate is 68.33%,lift-off effect is better.Increasing the substrate temperature is beneficial for laser lift-off process.This study has certain significance for the industrial application of polyimide films in the field of flexible electronics.
作者
陈星
游利兵
代甜甜
王宏伟
杨礼昭
程超
方晓东
CHEN Xing;YOU Libing;DAI Tiantian;WANG Hongwei;YANG Lizhao;CHENG Chao;FANG Xiaodong(Anhui Province Key Laboratory of Photonic Devices and Materials,Anhui Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Hefei 230031,China;School of Science Island,University of Science and Technology of China,Hefei 230026,China)
出处
《激光技术》
CAS
CSCD
北大核心
2020年第1期100-107,共8页
Laser Technology
基金
国家自然科学基金资助项目(41627803)
安徽省重点研究和开发计划资助项目(1804a0802219)
