摘要
液晶玻璃平板在线检测流程当中,气膜的流场压力和速度的分布需要较高的稳定性,为了比较不同的气浮平台供气方式对气膜稳定性的影响,结合气体润滑理论,分析得出气膜稳定后的压力分布情况。通孔在气浮板上通常采用阵列排布,使用Gambit对气浮平台三维模型进行网格的划分,再将其导入软件Fluent中,对正压供气方式和正负压供气方式进行仿真计算,分析得到2种不同供气模式下气浮力的分布以及速度分布。由以上分析可得,若气浮系统中其余变量保持不变,正负压同时供气方式优势更加明显,气膜稳定后气浮力和速度分布平缓,所需气体的质量流量较正压供气方式更少。以正负压同时供气方式自制玻璃基板光学缺陷检测样机,实验结果表明气膜间隙变化量小于1μm。
During the on-line detection of liquid crystal glass plates,the distribution of the pressure and the velocity in the gas film flow field are required to be gentle and the stability.In order to compare the effects of different air-floating platforms on the stability of the gas film,combined with the gas lubrication theory,the pressure distribution of the stable gas film was obtained.The through holes were generally arranged in an array on the air floating plate.Gambit was used to mesh the three-dimensional model of the air-floating platform,and then introduced into the Fluent software to simulate the positive pressure air supply mode and the positive and negative pressure air supply mode.The distribution of the air buoyancy and velocity were obtained under two different air supply modes.From the above analysis,if the remaining variables in the air-floating system remain unchanged,the advantages of positive and negative pressure at the same time of gas supply are more obvious,and the air buoyancy and velocity distribution are smooth after the gas film is stabilized,and the mass flow rate of the required gas is less than that of the positive pressure.Based on the above research,a glass substrate optical defect detection prototype was fabricated by positive and negative pressure simultaneous gas supply.The experimental results show that the change of film gap is less than 1μm and the stability is good.
作者
周杨
李程伟
徐筱波
张勇
黄斌
ZHOU Yang;LI Cheng-wei;XU Xiao-bo;ZHANG Yong;HUANG Bin(Institution of Instrument Science and Opto-electronics Engineering,Hefei University of Technology,Hefei,Anhui 230009,China;BOE Technology Group Co.Ltd.,Hefei,Anhui 230012,China)
出处
《计量学报》
CSCD
北大核心
2019年第6期994-999,共6页
Acta Metrologica Sinica
基金
国家重大科学仪器设备开发专项(2013YQ220749)
