摘要
拥有高的储能密度值和良好的温度稳定性的介电薄膜电容器在现代微电子系统中非常具有吸引力。为研究不同底电极对(Ba(0.904)Ca(0.096))(Zr(0.136)Ti(0.864))O3(BCZT)薄膜储能性能的影响,采用溶胶凝胶法制备了沉积在不同底电极上的BCZT薄膜。除了Pt(111)/TiOx/SiO2/Si底电极(简写为Pt)外,引入了LaNiO3氧化物导电层构造LaNiO3/Pt复合底电极。微观结构测试结果表明,LaNiO3氧化物导电层的引入有效的改善了BCZT薄膜的表面形貌,薄膜表面气孔尺寸明显变小。电学性能测试结果表明,直接沉积在Pt底电极上的BCZT薄膜储能密度为8.58 J/cm^3,效率很低,仅为64.6%;相反,沉积在LaNiO3/Pt复合底电极上的BCZT薄膜在相同电场下其储能密度为12.53 J/cm^3,效率提升到84.7%。此外,沉积在LaNiO3/Pt复合底电极上的BCZT薄膜显示出良好的温度稳定性:在20~210℃的温度范围内,储能效率保持在80%以上。
Dielectric film capacitors with large energy storage density and high thermal stability are very attractive in modern microelectronic systems.To study the effect of different bottom electrodes on the energy storage properties of(Ba 0.904 Ca 0.096)(Zr 0.136 Ti 0.864)O 3(BCZT)thin films,BCZT thin films deposited on different bottom electrodes were prepared by sol-gel method.In addition to the Pt(111)/TiOx/SiO 2/Si(abbreviated as Pt)bottom electrode,a LaNiO 3 conductive layer was introduced to construct the LaNiO 3/Pt composite bottom electrode.The analysis results of microstructures indicate that LaNiO 3 conductive layer can effectively improve the surface structure by reducing the sizes of micropores on the surface of BCZT thin films.The results of electrical performance test indicate that the BCZT thin film deposited directly on Pt bottom electrode has an energy storage density of 8.58 J/cm^3,and its efficiency is only 64.6%,while the efficiency of the BCZT thin film deposited on LaNiO 3/Pt composite bottom electrode is 84.7%,and the energy storage density is 12.53J/cm^3 at the same electric field.Moreover,BCZT thin film deposited on LaNiO 3/Pt composite bottom electrode exhibits good thermal stability,whose efficiency stays above 80%from 20℃to 210℃.
作者
何上恺
唐嗣麟
梁国闯
彭彪林
王宁章
HE Shang-kai;TANG Si-lin;LIANG Guo-chuang;PENG Biao-lin;WANG Ning-zhang(School of Resources,Environment and Materials,Guangxi University,Nanning 530004,China;School of Physical Science and Technology,Guangxi University,Nanning 530004,China;State Key Laboratory of Nickel and Cobalt Resources Comprehensive Utilization,Jinchang 737100,China)
出处
《广西大学学报（自然科学版）》
CAS
北大核心
2019年第5期1422-1427,共6页
Journal of Guangxi University（Natural Science Edition）
基金
国家自然科学基金(51402196、51602159)
广西自然科学基金(2016GXNSFCB380006、2017GXNSFFA198015)
广西大学人才引进科研启动基金(Grant XTZ160530)
“镍钴资源综合利用国家重点实验室”开放课题资助项目(金科冶2019-01)
关键词
BCZT
溶胶凝胶
薄膜
储能
热稳定性
BCZT
sol-gel
thin film
energy storage
thermal stability
