摘要
使用气相色谱—质谱联用法,采用全扫描模式,采取提取特征离子的方式对原始谱图进行处理,建立了电子气中微痕量氟化物杂质的定性、定量方法。检测限低、灵敏度高,单次进样,便可实现对多种氟化物杂质的定性和定量,且不受主成分的影响,是分析电子气中微痕量氟化物杂质高效精确的分析方法。
In this essay,gas chromatography-mass spectrometry(GC-MS)was used to establish the qualitation and quantitation methods for the micro/trace fluoride impurities in the electronic grade gas.SCAN mode was used and characteristic ions were extracted to analyze the spectra.The method has low detection limit,and high sensitivity;single injection can achieve qualitative and quantitative determination of a variety of fluoride impurities,and is not affected by the main component.It is an efficient and accurate analysis method for the analysis of micro/trace fluoride impurities in electronic grade gases.
作者
魏王慧
董翊
于瑞祥
姜阳
高艳秋
任逸尘
陈鹰
WEI Wanghui;DONG Yi;YU Ruixiang;JIANG Yang;GAO Yanqiu;REN Yichen;CHEN Ying(Shanghai Institute of Measurement and Testing Technology,Shanghai 201203,China)
出处
《低温与特气》
CAS
2019年第5期35-40,共6页
Low Temperature and Specialty Gases
关键词
气相色谱-质谱联用法
氟化物
特征离子
定性
定量
gas chromatography-mass spectrometry
fluoride
characteristic ions
qualitation
quantitation
