摘要
异质结太阳电池沉积透明导电薄膜(TCO)作为导电层、减反射层,电极直接与TCO接触,故在TCO上电镀金属电极是非选择性的,需沉积种子层和图形化的掩膜,以实现选择性电镀及良好的附着。研究表明,金属与TCO之间具有优异的欧姆接触特性,比接触电阻低。SEM分析表明,电镀电极结构致密,与透明导电薄膜紧密附着,接触电阻小;丝印电极银颗粒间粘结不紧密,具有较多的空隙,线电阻提高,串联电阻增加。铜金属化可以实现更低的线电阻率、更好的电极高宽比,可以显著提高载流子收集几率,通过选择合适的种子层及后退火,铜电镀异质结电池光电性能显著改善,转换效率达到了22%,具有巨大的发展前景。
Transparent conducting oxide(TCO)is deposited as anti-reflection coating and conductive layer for silicon hetero-junction(SHJ)solar cell,which meant the necessity to mask the pattern of grid electrodes for selective plating.We investigated metal-TCO contact,the plated electrodes structure and plating process.The results reveal that the contact between metal and TCO is Ohmic contact,the special contact resistance is relatively low.Light-sensitive dry film was appropriate as plating resist due to its simple process,high resolution and rectangular shape.As a proof of concept,copper plated SHJ solar cell with an efficiency of 22%was fabricated in SIMIT’s R&D line.Compared with screen printed finger,copper plated finger showed narrow width,higher aspect ratio and lower bulk resistivity,leading to decreased shading loss without increasing gird power loss,which indicated the possibility to achieve higher efficiency by copper metallization after well optimization.
作者
俞健
卞剑涛
刘毓成
刘正新
Yu Jian;Bian Jiantao;Liu Yucheng;Liu Zhengxin(Shanghai Institute of Microsystem and Information Technology (SIMIT),Chinese Academy of Sciences,Shanghai 200050,China;University of Chinese Academy of Sciences,Beijing 100049,China)
出处
《太阳能学报》
EI
CAS
CSCD
北大核心
2019年第7期1959-1964,共6页
Acta Energiae Solaris Sinica
基金
上海市青年科技英才扬帆计划(17YF1423000)
国家自然科学基金(61204005)
上海张江创新平台建设资金(ZJ2015-ZD-001)
关键词
太阳电池
铜电镀
电性能
电极形貌
图形转移
solar cell
copper plating
electrical properties
finger morphology
patter process
