摘要
MEMS做为本世纪前沿技术,有着非常广阔的前景,越来越受到业界专注。本文介绍了华润上华设计中心研发的3轴加速度计的原理及ASIC电路设计,该电路由前置放大器、增益失调调节电路、模数转换器、温度感应器及数字信号处理电路等组成。本电路结构简单,精度高,功耗低,能很好地满足系统中惯性及加速度的测量。
As advanced technology of this century, MEMS has a very broad prospect and is increasingly focused by the industry. This paper introduces the principle and ASIC circuit design of the 3-axis accelerometer developed by CSMC Design Center. The circuit consists of preamplifier, gain offset adjustment circuit, analog-to-digital converter, temperature sensor and digital signal processing circuit. The circuit has the advantages of simple structure, high precision and low power consumption, and can well satisfy the measurement of inertia and acceleration in the system.
作者
王浩
WANG Hao(Design service center, CSMC technologies Corporation, Shanghai 200072, China)
出处
《中国集成电路》
2019年第7期35-40,88,共7页
China lntegrated Circuit
