摘要
柔性压力传感器是智能机器人和生物医疗等典型应用领域中的关键部件。针对10~50 kPa中等压力下对柔性压力传感器的高灵敏度、良好压力分辨率和快速响应需求,提出在PDMS基底上直写喷印石墨烯纳米片(GNPs)/多壁碳纳米管(MWCNT)构建S型折线图案化敏感单元,结合封装层微结构阵列,制备中压高灵敏度、低检测限的柔性压力传感器。试验结果表明,在压力为0~15 kPa和15~40 kPa的条件下,该传感器灵敏度分别为0.114 kPa^-1和1.41 kPa^1,响应/恢复速度快(约100 ms/50ms)。同时,其也可检测低至约3Pa的微小压力。同时,该传感器更是能对不同发声进行准确的区分识别,对不同的指压信号进行精确稳定反馈。可见,喷印制造柔性压力传感器将为语音识别、人工假肢、制备高性能电子皮肤和医疗康复器件等提供可能的优选方案。
Flexible pressure sensors are crucial building blocks for potential applications including intelligent robots and biomedical engineering.According to its demand of high resistivity,good pressure resolution and fast response for sensing medium pressure between 10 kPa and 50 kPa,a flexible pressure sensor is fabricated by direct writing graphene nanoplatelets(GNPs)/multi-walled carbon nanotubes(MWCNT)composite on a PDMS substrate to construct an S-shape sensing element,together with a microstructure-arrayed package component.Experiment results show that its sensitivity is about 0.114 kPa^-1 and 1.41 kPa^-1,under pressure of 0-15 kPa and 15-40 kPa respectively.Its response/recovery time is about 100/50 ms,which is faster than that of most medium pressure sensors.It also can sense subtle pressure change about 3 Pa.It is characterized to be of better repeatability and cycling stability.At the same time,the different phonation can be accurately distinguished and recognized by the sensor,and the different finger pressure signals can be accurately and stably feedback.Thus,such sensors will offer a possible optimized choice for speech recognition,artificial limb,fabrication of electronic skins and medical rehabilitation devices with high performance.
作者
罗毅辉
彭倩倩
朱宇超
王广顺
吴德志
朱睿
谢瑜
孙道恒
LUO Yihui;PENG Qianqian;ZHU Yuchao;WANG Guangshun;WU Dezhi;ZHU Rui;XIE Yu;SUN Daoheng(Department of Mechanical & Electrical Engineering,Xiamen University,Xiamen 361005;Department of Power Engineering,Xiamen University,Xiamen 361005;Shenzhen Research institute of Xiamen University,Shenzhen 518057)
出处
《机械工程学报》
EI
CAS
CSCD
北大核心
2019年第11期90-97,共8页
Journal of Mechanical Engineering
基金
国家自然科学基金(91648114)
中央高校基本业务费专项资金(厦门大学:20720170037)
浙江省重点研发计划(2018C01036)
深圳市科技计划项目(20180211151853569)资助项目
关键词
直写喷印
柔性压力传感器
石墨烯纳米片
微结构
电子皮肤
direct write
flexible pressure sensor
graphene nanoplatelets
microstructures
electronic skins
