摘要
电火花线切割半导体材料时,由于材料体电阻较大且存在接触势垒,即使在与电极丝发生接触构成电路短路的情况下,也能继续加工。由于放电间隙狭窄及工作液干扰严重,难以安装常规的传感器进行弯丝检测,而目前常用的电流脉冲概率检测法与往复渐进运动控制法并不能判断电路是否短路,无法真正避免电极丝弯丝故障。为此,提出了一种新型弯丝检测方法,其原理是在电极丝后侧增加一根与其平行的金属丝构成弯丝检测电路,同时设计专用的双平面定位机构进行检测丝的装夹与定位。据此原理试制了弯丝检测原型装置并进行了硅锭切割实验,结果表明:该方法可快速、准确、可靠地判断弯丝状态,减小电极丝断丝概率,提高加工效率。
Semiconductor material has great bulk resistance and contact barrier. Therefore,it can be machined by wire-cut electrical discharge machining (WEDM) even in the case of short-circuit that it contacts wire electrode during machining. Because the electrical discharge gap is very narrow and the working liquid has great interferences,normal sensors is hard to be installed to detect the wire bending status. And the commonly used methods such as circuit current pulse probability and reciprocating progressive motion control are not able to judge the short-circuit status,so the accident of wire-electrode bending cannot be avoided. Accordingly,a new bent wire detection method is proposed. The principle is adding a piece of metal wire parallel to the electrode wire at the back of the electrode wire to construct a detection circuit,and a special double plane positioning mechanism is designed to hold and position the detection wire. Prototype device of wire bending detection was developed according to the principle and silicon ingot slicing experiment was done. The result shows the proposed method is able to judge the bending status of the electrode wire rapidly,accurately and reliably,and the probability of wire breaking is decreased and machining deficiency is increased.
作者
罗福源
焦银亮
杨杰
LUO Fuyuan;JIAO Yinliang;YANG Jie(College of Mechanical and Electrical Engineering,Nanjing University ofAeronautics and Astronautics,Nanjing 210016,China)
出处
《电加工与模具》
2019年第1期20-23,38,共5页
Electromachining & Mould
基金
江苏省自然科学基金优秀青年基金资助项目(BK20160084)
中央高校基本科研业务费资助项目(NS2016056)