摘要
单晶硅是一种硬而脆的材料,生长完成后呈圆棒状,经加工后呈方形,用于太阳能电池的制作。切片是单晶硅片制备中的重要工序之一,为满足方形单晶硅机械加工装夹与定位的要求,在原四爪自定心卡盘的基础上改进了卡爪的结构。为了使卡爪与工件有一定的接触面积,确保夹持可靠,同时保证工件的定位精度,将卡爪设计为直面宽卡爪结构,并将滑座和直面卡爪设计为通过螺钉连接的分离结构,而非通用的整体爪。利用UG_CAE模块对滑座与直面卡爪进行有限元分析,其结构满足使用要求。
Monocrystalline silicon is a hard and brittle material.After its growth,it is round bar and is square after processing.It is used for the production of solar cells.Slicing is one of the most important processes in the preparation of single crystal silicon wafers.In order to meet the requirements of clamping and positioning of square monocrystalline silicon,the structure of the claw is improved on the basis of the original four-claw self-centering chuck.To ensure a certain contact area between the claw and the workpiece and to make the clamping reliable,the claw is designed as a straight-face wide-claw structure,and the positioning accuracy of the workpiece is guaranteed.The claw adopts split-type structure which is connected by screws.Through the finite element analysis of slide seat and straight face claw,its structure meets the requirement of application.
作者
李华强
刘江
LI Hua-qiang;LIU Jiang(School of Mechanical Engineering Inner Mongolia University of Technology,Hohhot 010051,China)
出处
《机械工程与自动化》
2018年第6期107-108,共2页
Mechanical Engineering & Automation
基金
内蒙古工业大学科学研究项目(ZD201601)
关键词
直面卡爪
有限元分析
结构改进
four jaw chuck
finite element analysis
structure improvement
