摘要
采用低压等离子喷涂成形技术制备片状及回转体钨靶材,分析真空室压力对钨靶材致密度、氧质量分数、微观结构、显微硬度及抗拉强度等性能的影响,并对片状钨靶材的磁控溅射镀膜进行研究。结果表明:随着真空室压力由1.3×104Pa增大至3.9×104Pa,钨粉充分熔化铺展,未熔W颗粒减少,钨靶材氧含量稍有提高,致密度,显微硬度和抗拉强度分别增大至97.2%,377.8HV0.025及201.1MPa。然而,当真空室压力进一步增大至6.5×104Pa后,钨靶材层片结合界面形成絮状的W3O夹杂层,氧含量增大至0.71%,其各项性能反而有所降低。低压等离子喷涂成形片状钨靶材(3.9×104Pa真空室压力)可磁控溅射沉积出平整、致密、连续的钨薄膜,镀膜厚度约为300nm。XRD结果表明,钨薄膜为体心立方结构,沿(110)方向择优生长。磁控溅射离子的均匀轰击导致钨靶材表面快速溅射及均匀减薄,溅射表面及截面较为平整、光滑,溅射凹坑接近纳米级。
Planar and rotary tungsten targets were fabricated by low pressure plasma spraying(LPPS).The effects of chamber pressure on the relative density,oxygen content by mass,microstructure,micro-hardness and ultimate tensile strength(UTS)of tungsten targets were analyzed.In addition,the magnetron sputtering experiment of LPPS tungsten target was studied.As chamber pressure increased from 1.3×10 4Pa to 3.9×10 4Pa,tungsten powders were full melted and spread with decreased unmelted particles existing in the target,the oxygen content in the tungsten target slightly improved.At the same time,relative density,micro-hardness,and UTS of LPPS tungsten target increased up to maximum values as 97.2%,377.8HV 0.025 and 201.1MPa,respectively.However,oxygen content of tungsten targets increased significantly up to 0.71%with floc like W 3O layer(about 200nm thickness)being formed at lamellar bonding interface as chamber pressure further increasing up to 6.5×10 4Pa.Instead,relative density,micro-hardness and UTS of tungsten target decrease for detrimental effect of oxygen content.Smooth,dense and continuous tungsten thin film with the thickness of about 300nm can be deposited by magnetron sputtering from LPPS tungsten target under chamber pressure of 3.9×10 4Pa.XRD spectra show that the tungsten thin film in body centered cubic structure grows preferentially along(110)direction.The uniform bombardment of sputter ion results in rapid sputtering and uniform reduction on the surface of tungsten targets during magnetron sputtering.The sputtering surface and cross section are even and smooth with the nano-scale sputtering spits being formed.
作者
王跃明
唐求豪
闫志巧
王芬
WANG Yue-ming;TANG Qiu-hao;YAN Zhi-qiao;WANG Fen(Key Laboratory of High Efficiency&Precision Machining of Difficult-to-cut Material of Hunan Province,Hunan University of Science and Technology,Xiangtan 411201,Hunan,China;Guangdong Provincial Key Laboratory for Technology and Application of Metal Toughening,Guangdong Institute of Materials and Processing,Guangzhou 510650,China;National Engineering Research Center of Near-net-shape Forming for Metallic Materials,South China University of Technology,Guangzhou 510640,China)
出处
《材料工程》
EI
CAS
CSCD
北大核心
2018年第10期104-112,共9页
Journal of Materials Engineering
基金
湖南省自然科学基金(2016JJ5029)
湖南省军民融合产业发展专项资金(B116J1)
材料成形与模具技术国家重点实验室(华中科技大学)开放基金(P2016-20)
国家金属材料近净成形工程技术研究中心(华南理工大学)开放基金(2016003)
广东省金属强韧化技术与应用重点实验室(广东省材料与加工研究所)开放基金(GKL201610)
湖南省湘潭市企业科技特派专家项目(CXY-TPZJ20171007)
关键词
低压等离子喷涂
钨靶材
显微组织
力学性能
磁控溅射
low pressure plasma spray
tungsten target
microstructure
mechanical property
magnetron sputtering
