摘要
利用XPS能谱分析结合平行成像技术,在功能器件等材料微区测量方面进行了一些探索,并选取了三类比较有代表性样品,通过设计合理的方法分别对其表面微区进行了有效测量,获得较好的测量结果。
In this paper,the material microanalysis measurement on functional devices was investigated by using XPS analysis combined with parallel imaging technology.Three kinds of representative samples were selected and the surface microanalysis was effectively measured by reasonable design method,and good results were obtained.
作者
徐建
郝萍
周莹
Xü Jian;Hao Ping;Zhou Ying(Shanghai Institute of Measurement and Testing Technology)
出处
《上海计量测试》
2017年第5期9-12,共4页
Shanghai Measurement and Testing
基金
上海市质量技术监督局科研项目(2015-03)
关键词
XPS分析
平行成像技术
表面微区分析
XPS analysis
parallel imaging technique
surface microanalysis
