摘要
最新研制的接触式激光量块干涉仪主要用于测量一、二等量块的中心长度 ,其长度测量不确定度达到 ( 0 .0 2 +0 .2 L )μm。文中介绍了其工作原理、测量不确定度分析 。
A type of contact laser gauge block interferometer developed recently is mainly used in measuring the center length of grade 1 and 2 gauge blocks.The uncertainty of measurement has reached (0 02+0 2\%L\%)μm. The operation principle and the uncertainty analysis of measurement are presented in this paper.The testing data measured is listed in the paper also.
出处
《航空计测技术》
2002年第5期20-24,共5页
Aviation Metrology & Measurement Technology
关键词
量块
检定
接触式激光量块干涉仪
工作原理
gauge block
verification
type of contact
laser gauge block interferometer
