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微型机械薄膜结构在量子力作用下的稳定性和粘附问题 被引量:4

MECHANICAL STABILITY AND STICKING OF A MEMBRANE STRIP STRUCTURE IN MEMS UNDER CASIMIR FORCES
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摘要 稳定性和粘附在微型机械的制造和运动过程中是很重要的问题。由于微型机械运动构件之间的间隙通常处于微米、纳米量级,因此需考虑量子力学的影响,如Casimir力。首先对两平行的多晶硅平板之间的Casimir力进行了分析,并考虑表面粗糙度、导电常数和温度的影响,然后讨论了Casimir力对微腔的薄膜结构的作用。当只考虑Casimir力作用时,该结构存在稳定的平衡态和不稳定的非平衡态,由量纲-数K值决定。如果K值大于极值K1,该结构就会塌陷。极值K1随薄膜与固定面之间的距离变化而变化。这为评价该系统在给定尺寸参数、材料特性和没有其他力的影响下的稳定性提供了依据,而且可设计出高L/δ比值、不出现塌陷的微型机械薄膜微腔结构。 Mechanical stability and sticking are the troublesome problems in the microfabrication process and operating when components in MEMS working in the sub-micrometer regime, where some quantum mechanical effects, hitherto neglected, will need to be taken into account, for example, the Casimir effect. The analysis of the role of the Casimir effect on a membrane strip structure considering roughness, conductivity and temperature corrections is presented. With nothing other than the Casimir force loading the strip, there exist a stable static equilibrium state and an unstable static equilibrium state. The state can be determined by the value of dimensionless constant K. The membrane strip will collapse if K is larger than the critical value of K1. This provides a way to check if a system of given dimensions and material properties will have a stable equilibrium position. This also provides a way to design a membrane strip with high aspect ratio (L/δ) that is not easily to collapse into the surface.
出处 《机械工程学报》 EI CAS CSCD 北大核心 2002年第9期52-56,共5页 Journal of Mechanical Engineering
基金 博士点基金资助项目(2000000338) 江苏大学高级人才基金项目(1663000004)
关键词 CASIMIR力 微型机械 多晶硅 稳定性 粘附 Casimir force MEMS Polysilicon Stability Sticking
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共引文献60

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