摘要
利用镀膜技术和硅平面工艺在经过干氧氧化的硅衬底上制备一层钛铌酸锶(Sr NbxTi1-xO3)薄膜,然后制备成平面型薄膜光敏传感器。对钛铌酸锶薄膜的吸收光谱进行测定,得到其禁带宽度为2. 70 e V,对可见光有良好的敏感性。样品在稳定光照下,光电流随照度的增大而增大;温度对光敏特性影响很大,本传感器适用于稳定光照和室温下使用。
A layer of SrNbxTi1-xO3 thin film is prepared on the silicon-based passing dry-oxygen oxidation by using coating technology and silicon planar process,and photosensitive sensor with planar thin film is prepared.Absorption spectrum of SrNbxTi1-xO3 thin film is determinated,the obtained forbidden bandwidth is 2.70 e V and it has good sensibility to visible light.When placing the sample in stable illumination,light current enlarges along with enlargement of illumination;temperature has great influence on photosensitive characteristic,so this sensor is appropriate to use in stable illumination at room temperature.
作者
廖荣
刘慧君
柯嘉聪
李涌春
廖鸿韬
罗志勇
LIAO Rong;LIU Huijun;KE Jiacong;LI Yongchun;LIAO Hongtao;LUO Zhiyong(School of Electronic and Information Engineering,South China University of Technology,Guangzhou 510640,China)
出处
《传感器与微系统》
CSCD
2019年第8期15-17,24,共4页
Transducer and Microsystem Technologies
基金
2018年华南理工大学第五批“探索性实验”项目(Y9180400)
2018年华南理工大学“国家级大学生创新创业训练计划”资助项目(Y9180210)
2018年华南理工大学“学生研究计划”资助项目
关键词
光敏传感器
钛铌酸锶
光谱
照度
光电导
photosensitive sensor
SrNbxTi1-xO3
spectrum
illuminance
photoconduction
