摘要
以拓宽Ag膜波长调制型表面等离子体共振(SPR)传感器的工作波长区间,将Ti O_2膜沉积于Ag膜表面制成Ag-Ti O_2复合薄膜。利用数值计算方法对不同厚度Ag膜和Ag-Ti O_2复合膜波长调制型SPR光谱特性进行仿真研究。仿真结果表明:共振吸收峰显著依赖于Ag膜厚度;当保持Ag-Ti O_2复合膜厚度60 nm时,复合薄膜SPR波长随Ti O_2厚度的增大而向长波长方向移动,发现红移;与60 nm厚Ag膜共振波长相比,12 nm厚Ti O_2与48 nm厚Ag组成的复合膜共振波长红移超过200 nm。
In order to broaden working wavelength range of surface plasmon resonance （SPR） sensors based on Ag thin film, deposit TiO2 thin film onto Ag film to fabricate Ag-TiO2 composite thin films. The spectral properties of wavelength modulation type SPR sensor based on Ag thin films and Ag-TiO2 composite thin films are simulation researched by means of numerical calculation method. The resuhs of the simulation show that the resonance absorbing peaks of wavelength modulation type SPR remarkably depend on Ag film thickness. When the thickness of the composite film is kept at a constant thickness of 60 nm, the resonant wavelength increases with increasing thickness of TiO2 thin films, red-shift occur ; wavelength red-shift range can be up to over 200 nm for Ag-TiO2 composite films with a thickness of TiO2 film12 nm and Ag film 48 nm.
出处
《传感器与微系统》
CSCD
2016年第3期16-17,21,共3页
Transducer and Microsystem Technologies
基金
国家自然科学基金资助项目(51474069
51374072
51101027)
国家科技重大专项课题资助项目(2011ZX05020-006)
黑龙江省新世纪优秀人才支持计划资助项目(1253-NCET-002)
关键词
表面等离子体共振
共振波长
红移
surface plasmon resonance（SPR）
resonant wavelength
red-shift
