摘要
通过对微机电系统(MEMS)纳米量热传感器原理与热损耗机理分析,借助有限元分析(FEA)软件研究不同结构、材料种类的基底对纳米量热传感器热分布、功耗的影响,并通过对纳米量热信号的仿真,验证了器件的可行性,进而依据仿真结果对纳米量热传感器的性能进行优化。研究可以为其他不同类型的量热器件的仿真与设计提供参考依据。
Substrate is crucial to develop nanocalorimeter with high performance.By analysis on theory of microelectro-mechanical system(MEMS)nanocalorimeter and thermal loss using finite element analysis(FEA)effect of different types of substrate materials and structure on thermal distribution and power consumption are studied and the feasibility of the device is verified by simulation of nanocalorimetric signals.Characteristics of the device is optimized according to the simulation results.The research can provide reference basis for design and simulation of other type of nanocalorimeter.
作者
蒲逸然
谢建良
王昕
PU Yiran;XIE Jianliang;WANG Xin(National Engineering Research Center of Electromagnetic Radiation Control Materials,University of Electronic Science and Technology of China,Chengdu 611731,China)
出处
《传感器与微系统》
CSCD
2019年第5期10-12,16,共4页
Transducer and Microsystem Technologies
关键词
热分析
微机电系统
有限元
纳米量热技术
热损耗
热容
thermal analysis
micro-electro-mechanical system(MEMS)
finite element analysis(FEA)
nanocalorimetry
heat loss
heat capacity
