摘要
Previous studies show that near linearity exists between displacement and charge of piezoelectric actuators, while studies under higher fields are lacking and long-time displacement self-sensing is still a challenge. Here we indicate that precise, long-time displacement self-sensing can be accomplished using the Sawyer–Tower circuit, where a high-impedance electrometer and a non-leaky capacitor are used to measure the charge. Calibrating the results on a piezoelectric unimorph cantilever shows that the displacement resolution of charge self-sensing is ~3 nm, much better than that of ~40 nm for the calibrating laser sensor. Testing results under a unipolar field up to 2 kV/mm with different periods indicate that a direct proportional relationship holds between charge and displacement with the maximum error of 4.65%. The self-sensing time can be over 20 min or even longer if a higher-impedance electrometer is used.
Previous studies show that near linearity exists between displacement and charge of piezoelectric actuators, while studies under higher fields are lacking and long-time displacement self-sensing is still a challenge. Here we indicate that precise, long-time displacement self-sensing can be accomplished using the Sawyer–Tower circuit, where a high-impedance electrometer and a non-leaky capacitor are used to measure the charge. Calibrating the results on a piezoelectric unimorph cantilever shows that the displacement resolution of charge self-sensing is ~3 nm, much better than that of ~40 nm for the calibrating laser sensor. Testing results under a unipolar field up to 2 kV/mm with different periods indicate that a direct proportional relationship holds between charge and displacement with the maximum error of 4.65%. The self-sensing time can be over 20 min or even longer if a higher-impedance electrometer is used.
作者
Qiang-zhong Wang
Gang Wang
Fa-xin Li
王强中;王刚;李法新(LTCS and College of Engineering, Peking University, Beijing 100871;Centee for Applied Physics and Technology, Peking University, Beijing 100871)
基金
Supported by the National Natural Science Foundation of China under Grant No 11521202
