摘要
通过向ZrB_2薄膜中添加N和O元素,利用纳米复合结构和"预氧化"机制有望提高薄膜韧性、耐磨性能和耐热能力,本文系统研究了氮气流量对Zr-B-O-N薄膜摩擦学行为的影响。采用直流反应磁控溅射技术研制了ZrB_2薄膜和不同成分的Zr-B-O-N薄膜,利用扫描电镜观察薄膜的表面形貌,销盘式摩擦试验机测试薄膜的摩擦磨损性能,分析磨损失效机理。研究结果表明:在ZrB_2薄膜中添加N和O元素后,耐磨性能得到明显提高,随着氮气流量的增加,薄膜表面质量越来越好。结合力学性能测试结果,发现硬度不是影响薄膜耐磨性能的唯一要素,H/E*值越大,薄膜抗磨损能力越强。当氮气流量比为5%时,尽管Zr-B-O-N薄膜硬度只有15 GPa,却具有最低的磨损率1. 65μm3/N·mm。该工作为定量探讨薄膜力学参量与抗磨损性能的关系提供了重要实验依据。
Herein,we reported the surface modification of N,O dual doped ZrO2（ Zr-B-O-N） coatings,synthesized by DC reactive magnetron sputtering on substrate of 304 stainless steel. The influence of the N2/（ N2＋ O2＋Ar） flow-rate on the tribological properties of the coatings was investigated with scanning electron microscopy and mechanical probes. The results show that the flow-rate had a major impact. For example,N,O dual doping significantly enhanced the surface hardness and wear-resistance. As the flow-rate-ratio increased,the number and size of＂large＂grains on the surface decreased,resulting in the increases of surface toughness,compactness and wear-resistance,possibly due to formation of nanocomposite structure. Synthesized at a flow-rate of 5%,the coating displayed the smallest friction coefficient and the lowest wear-rate of 1. 65 μm3/N·mm,though its hardness was only15 GPa. The wear-resistance was found to depend both on surface hardness and on elastic modulus.
作者
吴立国
王铁钢
郭玉垚
杨祖兵
刘艳梅
唐宽瑜
Wu LiGuo;Wang Tiegang;Guo Yuyao;Yang Zubing;Liu Yanmei;Tang Kuanyu(Tianjin Public Vocational Training Center of China,Tianjin 300350,China;Tianjin Key Laboratory of High Speed Cutting and Precision Manufacturing,Tianjin University of Technology and Education,Tianjin 300222,China)
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2018年第10期894-900,共7页
Chinese Journal of Vacuum Science and Technology
基金
国家自然科学基金项目(51301181)
天津市高等学校创新团队培养计划项目(TD13-5096)
