摘要
微杜瓦内置吸气剂是一项关键技术,使红外微杜瓦内部长期维持高真空状态,保证红外探测器组件全寿命周期内可靠工作。采用传统方法预测微杜瓦真空寿命不仅耗时,而且难以及时指导微杜瓦设计和技术改进。通过分离影响杜瓦真空寿命的核心因素:贮存温度和吸气剂用量,采用单因素实验的方法评价微杜瓦真空寿命,实现真空寿命的快速评价。结合内置吸气剂的杜瓦高温贮存实验,预估室温下真空寿命。另外,采用杜瓦内置真空规技术,极大地缩短了内置吸气剂杜瓦的高温贮存试验时间,为微杜瓦的吸气剂用量配置和技术改进提供及时的信息资源。
A novel technique was developed to rapidly predict the longest holding-time of high vacuum in micro-Dewar of infrared detector. First,the long-term thermal outgassing was mathematically modeled,theoretically analyzed and experimentally evaluated. Next,the influence of the elevated storage temperature（ 30℃） and getter content on the high vacuum holding time was experimentally investigated. The preliminary results show that the thermal outgassing depended strongly on the storage temperature but weakly on the getter content,and that high temperature aging,for a much shorter period of time,is capable of predicting the longest holding-time of high vacuum at room temperature. Finally,a miniaturized（ INO MEMS） vacuum gauge,installed inside the micro-Dewar with built-in getter material,significantly reduced the high-temperature storage time from 226 days to - 23 days.
作者
张亚平
徐世春
徐冬梅
刘湘云
高玲
Zhang Yaping;Xu Shichun;Xu Dongmei;Liu Xiangyun;Gao Ling(Kunming Institute of Physics,Kunming 650223,Chin)
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2018年第7期557-563,共7页
Chinese Journal of Vacuum Science and Technology
关键词
微杜瓦
真空寿命
快速评价
吸气剂用量
内置微型规
Micro-Dewar
Vacuum lifetime
Rapid Evaluation
Getter usage
Built-in micro gauge
