摘要
提出了一种新的无线无源高温压力传感器结构,该传感器的结构主要由含有内置空腔的基片集成圆波导（SICW）谐振器和集成于波导上金属面的缝隙天线两部分组成。共面波导天线（CPW）发出的频率电磁信号通过缝隙天线耦合到传感器内部,并经由缝隙天线反馈到共面波导天线。当外部压力作用于传感器的空腔上表面时,传感器的有效介电常数发生变化,从而导致传感器的谐振频率发生变化。传感器的试样通过高温共烧陶瓷（HTCC）微组装工艺与丝网印刷技术相结合进行制备。实验过程中,共面波导天线与网络分析仪进行连接,通过网络分析仪对天线的S11参数进行测试,进而可以从频率曲线中对传感器的谐振频率进行提取。通过对制备的传感器进行不同温度下的压力测试,发现提出的压力传感器在800℃高温下仍然可以正常工作,在800℃时传感器的测试灵敏度为0.124 5 MHz/kPa。
A new wireless passive high temperature pressure sensor structure was proposed.It was mainly composed of a substrate integrated circular waveguide（SICW）resonator with a builtin cavity and a slot antenna integrated on the metal surface of the waveguide.The frequency electromagnetic signals from the coplanar waveguide antenna（CPW）coupled to the inside of the sensor and fed back to the coplanar waveguide antenna through the slot antenna.When the external pressure applied on the upper surface of the sensor cavity,the effective dielectric constant of the sensor changed,leading to the change of the resonant frequency of the sensor.The sample of the sensor was prepared by the high-temperature co-fired ceramics（HTCC）micro-assembly process and the screen printing technique.During the experiment,the CPW antenna was connected with the network analyzer,and the S11 parameter of the antenna was tested by the network analyzer,then the resonant frequency of the sensor was extracted from the frequency curves.The pressure sensor was tested at different temperatures.It is found that the proposed pressure sensor can work well at the high temperature of 800 ℃,and the test sensitivity of the sensor is0.124 5 MHz/kPa at 800 ℃.
作者
郭彦杰
谭秋林
张磊
逯斐
郭晓威
Guo Yanjie,Tan Qiulin,Zhang Lei,Lu Fei,Guo Xiaowei(a. Science and Technology on Electronic Test and Measurement Laboratory, b. Key Laboratory of Instrumentation Science ＆ Dynamic Measurement of Ministry of Education, North University of China, Taiyuan 030051, Chin)
出处
《微纳电子技术》
北大核心
2018年第4期247-251,264,共6页
Micronanoelectronic Technology
基金
国家自然科学基金资助项目(61471324)
山西省青年拔尖人才支持计划项目
关键词
基片集成圆波导(SICW)
高温共烧陶瓷(HTCC)
无线无源
高温压力传感器
共面波导天线
substrate integrated circular waveguide （SICW）
high-temperature co-fired ceramics （HTCC）
wireless passive
high temperature pressure sensor
coplanar waveguide antenna
