摘要
针对黏接法和烧结法制备磁性磨粒工艺过程中的破碎难题,采用化学法制备以Fe_3O_4为核、SiO_2为壳的包覆型磁性磨粒。通过透射电镜、X射线衍射、红外光谱和磁感应强度对该磨粒进行性能分析,用制备出的包覆型磁性磨粒加工硅片,并进行加工性能研究。结果表明,包覆型磁性磨粒的制备工艺简单,性能良好,且用此包覆型磁性磨粒可以有效加工硅片。
To solve the problem of crushing in the process of preparing magnetic abrasive by bonding method and sintering method,a method for preparing coated magnetic abrasive by chemical method was proposed with Fe_3O_4 as the core and SiO_2 as the shell.The coated magnetic abrasives were prepared and analyzed.The performance of abrasive was analyzed by transmission electron microscopy,X-ray diffraction,infrared spectroscopy and magnetic induction.The silicon wafers were processed by the coated magnetic abrasives to study the processing performance of the coated magnetic abrasive.It is concluded that the coated magnetic abrasive with good performance can be processed by chemical method,the preparation process of coated magnetic abrasive is simple,and the coated magnetic abrasive can be used to process silicon wafers.
出处
《兵器材料科学与工程》
CAS
CSCD
北大核心
2018年第1期101-104,共4页
Ordnance Material Science and Engineering
基金
国家自然科学基金(51175365)
山西省自然科学基金(201701D12076)
关键词
包覆型磁性磨粒
性能分析
硅片加工试验
coated magnetic abrasive
performance anatysis
silicon wafers processing experiment
