摘要
微机电系统(MEMS)表面微加工技术与IC工艺相兼容,利用该技术可以实现对压力传感器敏感结构尺寸的精确控制,并可用于提高传感器的过载能力。基于有限元仿真,通过应力分布的线性静力分析和非线性接触分析,确定压力传感器感压膜尺寸与过载能力之间的关系,给出了一种提高压力传感器过载能力的方法。在不增加工艺步骤和生产成本的前提下,优化了敏感结构的尺寸,使压力传感器的过载能力得到显著提高。
Surface micromachining technology of micro electromechanical system（ MEMS） is compatible with IC technology,which can realize the accurate control of the pressure sensor＇s sensitive structure size,and can be used to improve the overload capacity of the sensor.Based on the linear static analysis and nonlinear contact analysis of finite element simulation,the stress distribution on pressure sensitive film was presented,then the relationship was characterized between sizes of the film and overload capacity of the sensor.At last a method was proposed to improve overload capacity of the sensor.By the method,the sensitive structure size was optimized and the overload capacity was improved significantly without the increasing of process steps and the production cost.
出处
《仪表技术与传感器》
CSCD
北大核心
2017年第10期14-16,45,共4页
Instrument Technique and Sensor
基金
国家自然科学基金项目(61372019)
关键词
压力传感器
牺牲层技术
线性
过载能力
应变
非线性接触分析
pressure sensor
sacrificial layer technology
linear
overload capacity
strain
nonlinear contact analysis
