摘要
采用真空阴极多弧离子镀技术制备了Al Cr N多元复合纳米硬质涂层,利用洛氏硬度计、划痕仪、HV显微硬度计、球磨仪、扫描电子显微镜、能谱仪及X射线衍射仪检测并分析了涂层膜基结合力、显微形貌、相结构以及基体硬度、涂层厚度对涂层硬度的影响。结果表明,涂层以Al Cr N/Cr N结构沉积,随着涂层厚度的增加,膜基结合强度提高。涂层表面成波纹状,有少量大颗粒,涂层内部呈Na Cl结构,含有大量呈柱状形式生长的面心立方的c-Cr N相和c-Al N相,择优取向均为(200)。同等基体硬度时,涂层厚度的增加有利于涂层硬度的提高,最佳涂层厚度为3.5~5.0μm。同等涂层厚度时,涂层硬度随着基体硬度的增加而增加,当涂层厚度低于4.0μm,基材硬度是影响涂层塑性变形抗力的主要因素。
AlCrN multi-composite nano-hard coating was prepared by vacuum cathode arc ion plating （VCAIP）. The film-base bonding, microstructure, phase structure and the effects of substrate hardness and coating thickness on the hardness of the coating were investigated by the Rockwell indentation, scratch tester, HV microhardness tester, ball-crater instrument, scanning electron microscope, energy dispersive spectrometer and X-ray diffraction, respectively. The results show that the coating deposit as the AICrN/CrN structure, and the film-base bonding strength effect is better with the increment of the coating thickness. The surface of the coatirig is corrugated, and there are a few large particles,and the coating is mainly composed of NaCI structure, containing a large number of face-centered cubic c-CrN phase and c-AIN phase, and the preferred orientation is （200）. The same coating hardness, increasing coating thickness is good for the improvement of coating hardness, and the optimum coating thickness is from 3.5 μm to 6.0 μm. The same substrate hardness, the hardness of the coating increases with the increment of the hardness of the substrate. Furthermore, when the coating thickness is less than 4.0 μm, the hardness of the substrate is the mainly factor affecting the plastic deformation resistance of the coating.
出处
《铸造技术》
北大核心
2017年第10期2401-2404,共4页
Foundry Technology
基金
山东省泰山学者特聘专家专项(ts201511038)
山东省重点研发计划项目(2016ZDJS02A15)
关键词
阴极多弧离子镀
膜基结合力
涂层硬度
耐磨性
vacuum cathode arc ion plating
the film-base bonding
coating hardness
wear resistance
