摘要
从用作多晶硅还原炉内壁抗氧化、高反射镀层的角度出发,综述了贵金属镀层(包括金和银)、热浸镀铝层、镍基合金与镍基复合镀层,以及物理气相沉积TiN基镀层的反射率和抗高温氧化性能,分析了它们的优缺点,指出了目前存在的问题。
The reflectivity and high-temperature oxidation resistance of precious metal coatings （including gold and silver）, hot-dip aluminized coating, nickel-based superalloy and nickel-based composite coatings, as well as physically vapor deposited TiN-based coatings were reviewed from the viewpoint of their promising application as an oxidation-resistant and highly reflective coating for the internal wall of reduction furnace used in polysilicon production. The advantages and disadvantages of these coatings were analyzed. Some existing problems were pointed out.
出处
《电镀与涂饰》
CAS
CSCD
北大核心
2017年第16期894-898,共5页
Electroplating & Finishing
关键词
多晶硅
反射
抗氧化
电镀金
热浸镀铝
镍基合金
氮化钛
polysilicon
reflection
.oxidation resistance
gold plating
hot-dip aluminizing
nickel-based alloy
titanium nitride
