摘要
注入能量对离子注入影响明显,但目前探究注入能量对304不锈钢离子注N层影响报道较少。研究在N剂量相同的情况下,离子注N时不同注入能量(30~75 keV)对304不锈钢表面改性层的组织及性能的影响。采用离子注入软件SRIM2013模拟离子注入对304不锈钢的注N深度,并采用扫描电镜(SEM)、显微硬度仪、X射线衍射仪(XRD)、万能摩擦磨损试验机对表面改性组织、硬度、相结构、摩擦系数进行测试,并对微观机理进行了分析与讨论。研究表明:在相同剂量下(9.0×10^(17)cm^(-2)),在注入能量范围为30~60 keV时,表面生成了γN相。但随着注入能量达到75 keV,304不锈钢表面出现多孔形貌,且硬度、摩擦系数等力学性能下降。经注入能量60 keV注N后,所得注N试样的显微硬度约为基材的1.9倍,摩擦系数有所降低,从基材的0.62下降为注N后的0.32;注入能量60 keV是离子注入的最佳注入能量。
The influence of different implantation energy （30 - 75 keV） of N-ion implantation with the same N dosage on the structure and per- formance of modified layer on the steel surface was studied. The structure, hardness, phase composition and friction factor of modified layer were characterized by scanning electron microscope （SEM）, X-ray diffractometer （XRD） and friction wear testing machine. Results showed that under the same dosage （9.0× 10^17 cm-2） , /N phase was formed on the surface at the implantation energy range of 30- 60 keV. However, as the implantation energy increased to 75 keV, the 304 stainless steel presented porous morphology, and the hardness and the mechanical proper- ties such as friction efficiency declined. Moreover, after N- ion implantation under the energy of 60 keV, the micro- hardness of obtained N- implanted sample was 1.9 times as great as the substrate, and the friction factor reduced from 0.62 to 0.32. Therefore, the optimal energy for improving N- ion implantation was 60 keV.
出处
《材料保护》
CSCD
北大核心
2017年第5期18-22,41,共6页
Materials Protection
基金
湖南省科技重大专项(2012FJ1007)
高等学校博士学科点专项科研基金(20134324110001)
南华大学研究生科研创新项目(2016XCX12)资助
关键词
离子注入
N
304不锈钢
注入能量
耐磨性
ion implantation
N
304 stainless steel
implantation energy
wear resistance
