摘要
统计表明,在微纳加工领域中,由于热变形引起的误差占总误差的40%~70%。已经成为制约微纳加工发展的主要因素之一。本系统采用基于PLC的增量式数字PID控制方法,实现对微纳加工控制过程中环境温度的高精度控制。利用LabVIEW软件编程灵活的特点,设计控制系统界面,通过RS485接口实现计算机对PLC的实时监控,保存测量数据,实时进行精度分析。经长时稳定试验,本系统可以实现±0.05℃/24 h的控制精度(24 h内温度波动不超过±0.05℃),满足高精度加工系统的温度控制需求。
Statistics show that in the field of micro-nano processing,the error caused by the thermal deformation takes up from 40%to 70%of the total error,which has become one of the main factors of restricting the development of micro-nano processing.An incremental PID control algorithm based on PLC is used to achieve highprecision control of ambient temperature in the process of micro-nano control,and features of LabVIEW＇s flexible programming is taken full advantage of to design the interface of system.Meanwhile,through the RS485 interface,the computer real-time monitoring on the PLC is achieved and the measurement data are stored,then the precision of these data is analyzed.After a long time stability test,the system can achieve the precision of±0.05 t per 24 h,which meets the requirements of this system for high-precision temperature control.
作者
姚龙隆
陈晓荣
杨海马
涂建坤
陈成
YAO Long-long CHEN Xiao-rong YANG Hai-ma TU Jian-kun CHEN Cheng(School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China Shanghai Electric Cable Research Institute, Shanghai 200093, China)
出处
《测控技术》
CSCD
2017年第6期72-75,共4页
Measurement & Control Technology
基金
上海市自然科学基金项目(15ZR1417400)
国家自然科学基金青年基金项目(61302181)
关键词
微纳加工
高精度
增量式PID
micro-nano processing
high-precision
incremental PID
