摘要
微机械环形振动陀螺仪采用四波腹工作原理,具有精度高、抗冲击性能好等优点。通常情况下为了提高电容值和信噪比,环形结构会采用高深宽比方案,因此带来的footing效应直接影响了结构加工的成品率。本文在设计环形结构的基础上提出了一种在硅下表面溅射一层Al金属层的方法,能够避免footing效应的发生。实验结果表明,该方法有效提高了结构加工精度。同时,为了验证所设计结构的正确性,对加工出的结构进行了扫频测试,结构驱动模态谐振频率与设计值相差仅0.13%,并在此基础上搭建了测控系统,进一步进行了静态实验,结果表明其零偏稳定性指标为101(°)/h证明了设计和加工的可行性。
The MEMS vibrating ring gyroscope, which is based on four-antinode working principle, usually adopts high depth-to-width ratio structure to improve the capacitive value and SNR, which brings the Footing effect and makes the fabrication process more difficult. To solve this problem, a novel method is proposed which utilizes the Al metal layer attached under the silicon surface to restrain the footing effect. The fabrication results show that this method can effectively increase the processing precision of the structure. To verify the correctness of the designed structure, the frequency-sweeping testing on the structure manufactured is carried out, and based on this, the measurement and monitoring system is established. The static test is carried out, and the results show that the bias stability index of VRG sample is 101（°）/h, which prove the feasibility of the design and the fabrication process.
作者
李建华
徐立新
付博
王凤芹
LI Jian-hua XU Li-xin FU Bo WANG Feng-qin(National Key Laboratory of Science and Technology on Electromechanical Dynamic Control, Beijing Institute of Technology, Beijing 100081, China MEMS Cemer, Huaihai Industries Group Co. Ltd, Changzhi 046012, Shanxi, China)
出处
《中国惯性技术学报》
EI
CSCD
北大核心
2017年第2期240-243,共4页
Journal of Chinese Inertial Technology
基金
国家自然科学基金NSAF基金(U1630119)
北京理工大学学术启动计划基金
