摘要
为硅微陀螺设计了一种正交误差直流校正方法,通过设计校正结构和加载直流电压实现正交校正。建立了存在正交误差时敏感质量的运动微分方程,分析明确了正交响应的成因和对驱动运动轨迹的影响。为硅微陀螺设计了正交校正结构,实现构建静电耦合弹性系数并利用驱动运动产生校正静电力。校正力的频率和相位无需电路控制,使该方法相较于传统校正方法具备特殊优势。设计并分析了校正电压的两种加载方式,通过实验测试验证了正交响应幅值随校正电压的变化规律。实测校正电压接近理论值,证明了校正结构设计的正确性。该方法在双线振动式硅微陀螺中具有重要应用价值。
A quadrature correction method using DC voltages for silicon micro-gyroscope was designed. The quadrature correction was accomplished by a specially designed correction structure in combination with DC voltages. The differential equations of the proof mass＇s motion were established in consideration of quadrature error. The causes of the quadrature response and how it affects the drive motion trajectory were then derived. The quadrature correction structure was designed for silicon micro-gyroscope, through which a correction electrostatic force can be generated by using the created electrostatic coupling elastic coefficient and the drive motion. Comparied with traditional quadrature correction methods, this method has the advantage of eliminating the need of frequency and phase control. Two voltage loading methods were designed and analyzed, and the relative relationship between the quadrature response and the correction voltage was verified through experimental test. The actual values of correction voltage are close to the theoretical ones, proving the correctness of the structure design. This method has important application value in linear vibration silicon micro-gyroscope.
出处
《中国惯性技术学报》
EI
CSCD
北大核心
2014年第1期104-108,共5页
Journal of Chinese Inertial Technology
基金
国家自然科学基金项目(61101021)
中央高校基本科研业务费专项资金资助(3222003102)
关键词
硅微陀螺
正交误差
正交校正
直流电压
结构设计
silicon micro-gyroscope
quadrature error
quadrature correction
DC voltage
structure design
