摘要
为了实现对轮船发动机故障监测系统的可持续供电,针对轮船发动机振动特性以及故障监测系统应用需求,设计了一种基于d31工作模式的微机电系统(MEMS)压电振动能量收集器。该能量收集器采用了共质量块压电悬臂梁阵列结构,与传统单梁结构相比,其降低了MEMS压电振动能量收集器的机械阻尼。通过ANSYS软件对结构进行了优化设计,得到压电悬臂梁的优化尺寸为2.72mm×3.55mm×0.125mm,硅质量块的优化尺寸为14mm×8.45 mm×0.575 mm。设计了器件的加工工艺流程,并完成了芯片的制作。在加速度2g(g=9.8m/s2),谐振频率606Hz,最优化负载45kΩ下,输出电压为4.32V,输出功率为414.7μW,能够满足故障检测系统的可持续供电需求。
In order to realize the sustainable supply of a ship engine fault monitoring system,a new type of d31-based MEMS piezoelectric vibration energy harvester(PVEH)is proposed for the ship engine vibration characteristics and fault monitoring system application requirements.The PVEH consists of a sharing mass piezoelectric cantilever array structure.Compared with the conventional single beam structure,the machine damping is reduced.By using the ANSYS software for the structural optimization design,the optimized piezoelectric cantilever dimension is2.72mm×3.55 mm×0.125 mm and silicon mass dimension is 14 mm×8.45 mm×0.575 mm.The fabrication process flow is designed and the chip prototype is fabricated.The device produces an output voltage of 4.32 Vand output power of 414.7μW at an optimal load of 45kΩ,an acceleration of 2g(g=9.8m/s2)and a resonant frequency of606 Hz,which meets the application requirements of the sustainable supply of the fault monitoring system.
出处
《压电与声光》
CSCD
北大核心
2017年第3期383-386,共4页
Piezoelectrics & Acoustooptics
基金
中央高校基本科研业务费专项基金资助项目(106112015CDJXY120002)
