摘要
介绍了神光-Ⅲ中阵列光学组件缺陷的长景深检测系统的基本组成。利用在系统光阑处进行的相位调制,可以实现景深的延拓效果,从而可以实现在3~13m物距范围内的大景深成像探测。进一步论述了光学检测系统的设计指标、设计思想、设计结果及其仿真评价。模拟结果显示该系统可以实现3~13m纵向范围内阵列光学组件缺陷的同时检测。
This paper introduces the basic structure of a long depth of field array optical components defect detection system used in SG-Ⅲ.The phase modulation used on the system aperture can realize the depth of field extension effect,which can achieve large depth of field imaging detection from 3~13 mobject distance.The performance index,design ideas,design result and simulation evaluation of the optical detection system are expounded.It can achieve the defect simultaneous detection of the array optical components in longitudinal range of 3~13mby using proposed system.
出处
《光学学报》
EI
CAS
CSCD
北大核心
2017年第3期289-294,共6页
Acta Optica Sinica
基金
重庆理工大学星火计划项目(2014XH06)
关键词
光学设计
缺陷检测
波前编码
optical design
defect detection
wavefront coding
