摘要
针对高功率射频板条CO2激光器铜电极表面放电氧化、受射频放电的电子溅射,致使电极表面不光滑,辉光放电不均匀,光波导损耗严重等问题。利用Al2O3波导介质膜具有的反常色散效应、耐高温能力强的特点,采用磁控溅射镀膜技术对激光器电极表面先镀Al,而后阳极氧化获得Al2O3波导介质膜。分析了磁控溅射工艺对膜层结构的影响,测量了镀膜电极对CO2激光的反射率,并进行了放电实验检测。结果表明,溅射功率为250 W时可得到致密的镀膜层结构;厚度6μm的Al2O3薄膜,对波长10.6μm的CO2激光波导反射率最高达75%;电极镀膜后激光器输出功率在占空比为30%时为700 W,占空比为60%时达到了1300 W。
To solve the problems of the high power radio frequency （RF） slab CO2 laser surface oxidation by copper electrode discharge and RF discharge electronic sputtering which leads to rough electrode surface, an uniform glow discharge and serious optical loss and so on. The magnetron sputtering coating technology is used for laser electrode surface plating Al, and then anodic oxidation into Al2O3 waveguide dielectric film, based on the effect of anomalous dispersion and high temperature resistant ability of Al2O3 waveguide dielectric film. The influence of magnetron sputtering process on the film structure is analyzed; the reflectivity of the electrode coating to CO2 laser is measured and the discharge experiment is tested. The results show that when the sputtering power is 250 W, the compact film structure can be obtained; Al2O3 thin films with thickness of 6 μm , have the highest reflectance peak of 75% to CO2 waveguide laser wavelength of 10.6 μm ; The laser output power at a 30% duty cycle is 700 W, in the duty cycle of 60% reaches 1300 W after electrode coating.
出处
《中国激光》
EI
CAS
CSCD
北大核心
2015年第1期212-218,共7页
Chinese Journal of Lasers
基金
湖北省2014年支撑计划项目(2014AAA02)
关键词
薄膜
射频板条CO2激光器
镀膜技术
磁控溅射
光波导
反常色散
thin films
radio frequency-excited CO2 laser
coating technology
magnetron sputtering
planarwaveguide
anomalous dispersion
