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SiC MOSFET芯片设计关键技术及发展趋势 被引量:3

Key Techniques of SiC MOSFET Chip Design and its Development Trend
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摘要 介绍了SiC MOSFET器件应用所具有的技术优势,并从理想耐压与导通电阻理论入手,确定了漂移层耐压结构的优化设计;综合考量阈值电压、氧化层电场集中和导通电阻特性,确定了芯片元胞各关键区域的优化设计;最后,从导通电阻优化、更高电压等级芯片研制和单片集成续流二极管3方面,阐述了SiC MOSFET芯片未来的技术发展趋势。 It introduced the application advantages of SiC MOSFET and determined an optimized design of drift layer structure based on the theory of ideal blocking characteristics and on-state resistance.Afterwards,the design of key structures in cell was optimized in consideration of threshold voltage,oxide electric field crowding and on-state resistance.Finally,the development trend of SiC MOSFET chip was expounded from the aspects of on-resistance optimization,higher voltage grade chip development and monolithic integrated freewheeling diode.
出处 《大功率变流技术》 2017年第1期33-38,共6页 HIGH POWER CONVERTER TECHNOLOGY
关键词 SIC MOSFET 阻断特性 导通电阻 阈值电压 结构参数 SiC MOSFET blocking characteristics on-state resistance threshold voltage structure parameter
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