摘要
基于非色散红外吸收原理,以电调制红外光源、采样气室和双元红外探测器组成的红外传感模块为核心,利用差分吸收检测技术设计了一种小型化高性能的SF_6气体传感器。利用标准气体进行浓度标定,拟合了SF_6气体浓度与电压关系曲线,实现了对SF_6气体浓度的准确检测。根据传感器检测误差随环境温度变化的规律,系统研究了温度补偿方法,有效提高了传感器在不同温度下的检测精度。实验结果表明,该传感器系统在环境温度10℃~40℃、气体浓度0~2 500×10^(-6)范围内的检测精度小于±50×10^(-6),分辨率为1×10^(-6),系统响应时间小于5 s,具有良好的重复性和稳定性。
A miniature high performance SF6 gas sensor based on non-dispersive infrared (NDIR)absorption theory is designed by using the differential absorption detecting technology. In the system, the eore sensing module is com- posed of an electrically modulated infrared light source, a sample gas chamber and a dual channel infrared detector. Through the calibration with the standard SF6 gas, the relation curve between SF6 concentration and the output volt- age is obtained, which can be used for accurate detection of SF6 gas concentration. Since the detection error is changed with the ambient temperature, a temperature compensation method is studied and applied in the system, which effectively improves the detection accuracy. The experimental results show that the detection accuracy of the gas sensor is less than ±50×10-6 within the ambient temperature range of 10 ℃ to 40 ℃ and the gas concentrations from 0 to 2 500×10-6, as well as with good repeatability and stability. The resolution of the system is 1×10-6 and the system response time is less than 5 s.
出处
《传感技术学报》
CAS
CSCD
北大核心
2016年第12期1804-1809,共6页
Chinese Journal of Sensors and Actuators
基金
国家自然科学基金项目(11374161)
江苏高校优势学科Ⅱ期建设工程项目
国家级大学生实践创新训练计划项目(201610300030)
关键词
传感器
差分吸收
温度补偿
SF6气体
sensor
differential absorption
temperature compensation
SF6 gas