摘要
随着集成电路的迅速发展,测试过程中熔丝修调的精度受到越来越多的重视。在某些产品熔丝步距一致性欠佳的情况下,传统的查表法熔丝修调方案已经无法满足当下的精度要求,从而表现为测试过程中区域性或批次性的低良率,造成人力、物力的损失。将迭代法应用到熔丝表的计算中去成为了提升测试精度的必然趋势。采用迭代法的熔丝方案可以根据圆片当前区域的熔丝步距实时调整熔丝表,提升测试良率和测试精度。
With the rapid development of integrated circuits, the accuracy of fuse trimming is being paid increasingly more attention. Traditional look-up table trimming plan could no longer meet the accuracy requirements when the fuse step of some products are not consistent. The low yield in the test process leads to substantial loss of labor, materials and funds. Application of the iterative method in the calculation of fuse trimming table has become an inevitable trend for better testing accuracy. The method could adjust the fuse trimming table in real time according to the current area of the wafer.
作者
吴熙文
顾卫民
WU Xiwen GU Weimin(China Electronics Technology Group Corporation No.58 Research Institute, Wuxi 214035, China)
出处
《电子与封装》
2016年第12期23-25,共3页
Electronics & Packaging
关键词
熔丝修调
迭代法
熔丝步距
fuse trimming
iterative method
trimming step
