摘要
采用全陶瓷规管进行电荷屏蔽,实现了对薄膜真空计的改进,以满足在含有大量带电离子及饱和水蒸汽等特殊真空环境中低真空度的快速准确测量。介绍了提高传感精度且降低温度及水蒸气对电容薄膜真空计影响的方法、器件选择以及单片机控制系统等,并给出了部分测试结果。本文设计的低真空度测量系统具有模块化、精度高、响应速度快等优点,为国内特殊真空环境下低真空度测量系统提供了设计参考。
The conventional capacitance diaphragm vacuum gauge was modified to rapidly and accurately measure a low pressure in an environment characterized with saturated steam and / or charged gases. The modification mainly included the package of ceramic tube housing,which effectively isolates the gauge from the charged particles,reactive gases and water vapor. The impact of the realistic situation,including but not limited to the temperature,humidity,components and material types of the gauge,on the measurement sensitivity was mathematically modeled and analytically investigated for its design optimization. In addition,the single-chip microcomputer（ SCM） and temperature control units were adopted to improve the measurement precision. The test results show that the novel prototyped capacitance diaphragm vacuum gauge is capable of measuring rapidly,precisely and routinely the low pressure in an environment heavily ＂polluted＂by water vapor,reactive gasses and ionized particles.
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2016年第11期1316-1319,共4页
Chinese Journal of Vacuum Science and Technology
关键词
电荷屏蔽
饱和水蒸汽
电容薄膜真空计
单片机控制系统
Shielding against charged particles
Saturated steam
Capacitance diaphragm vacuum gauge
SCM control unit
