摘要
基于光纤低相干干涉技术的测厚原理,提出了透镜中心厚度检测系统的结构设计;分析了影响检测仪器检测精度的主要因素,并分别从光路、电路设计及信号处理等方面,提出了提高检测系统检测精度的方法;同时将K-means聚类算法应用于多组干涉信号峰值识别和提取,有效提高了系统测量的重复精度。所设计的系统具有结构简单、测量速度快等特点,测量精度优于1μm。
The principle of thickness measurement is introduced based on low coherence interferometry of optical fiber and the structure design of the test instruments for lens thickness is put forward;At the same time,the main factors affecting the measuring accuracy of the test instruments is analyzed.In addition,the method to improve the measuring accuracy of the system is proposed in the optical path,circuit design and signal processing.Furthermore,K-means clustering algorithm is applied to multi-group interference signal peak identification and extraction in order to increase the repeated accuracy of the measurement system.The designed system is characterized by high accuracy and rapid speed and the measuring accuracy of instrument is better than 1um
出处
《应用激光》
CSCD
北大核心
2016年第5期605-610,共6页
Applied Laser
基金
国家自然科学基金资助项目(项目编号:51575099)
上海市自然科学基金资助项目(项目编号:15ZR1401700)
关键词
光纤低相干干涉
透镜中心厚度
K-MEANS聚类
信号峰值
low coherence interference of optical fiber
lens center thickness
K-means clustering
signal peak
