摘要
We propose and experimentally demonstrate a broadband 1 × 3 adiabatic splitter based on the silicon-on-insulator technology, with simultaneous tapering of velocity and coupling. The designed structure becomes simulated transmission uniformity of three outputs better than 0.5dB in a broadband of 250nm, and a large simulated fabrication tolerance is obtained. A manufactured splitter whose parameters greatly diverge from the design acquires a measured result of the worst splitting ratio better than 1.5dB as well as an excess loss lower than 0.8 dB in a large wavelength range of 80nm. A post-simulation based on the tested splitter obtains a result that meets the actual transmission well.
We propose and experimentally demonstrate a broadband 1 × 3 adiabatic splitter based on the silicon-on-insulator technology, with simultaneous tapering of velocity and coupling. The designed structure becomes simulated transmission uniformity of three outputs better than 0.5dB in a broadband of 250nm, and a large simulated fabrication tolerance is obtained. A manufactured splitter whose parameters greatly diverge from the design acquires a measured result of the worst splitting ratio better than 1.5dB as well as an excess loss lower than 0.8 dB in a large wavelength range of 80nm. A post-simulation based on the tested splitter obtains a result that meets the actual transmission well.
基金
Supported by the National High-Technology Research and Development Program of China under Grant Nos 2015AA016904and 2013AA014402
the National Basic Research Program of China under Grant No 2011CB301701
the National Natural Science Foundation of China under Grant No 61275065
