摘要
为进一步发展环保经济的清洗方式,提出一种高速气流喷射的干式清洗方法。建立了高速气流喷射条件下去除光滑表面球形微粒的物理模型,将拖拽力与粘附力的比值定义为无量纲的再悬浮参数F*并给出其值的计算方法。选取玻璃基板和单晶硅片为样本平面、单分散的聚苯乙烯微粒为样本微粒,进行高速气流喷射清洗实验,实验探讨了F*与去除效率的关系。结果表明:高速气流喷射法为去除光滑表面微粒的有效方式;再悬浮参数F*可以作为评估去除效率的有效依据。
In order to develop an economical environmentally friendly cleaning method,a new dry cleaning method using high- speed air jet is investigated. A physical model of the removal of spherical particles on smooth surface is established under the condition of high- speed air jet. A calculation method of the dimensionless resuspension parameter F＊which is defined as the ratio of drag force to adhesion force is given. Cleaning experiments using high- speed air jet are carried out with monodisperse polystyrene particles on glass substrate and monocrystalline silicon wafer plate. The relationship between F＊and the removal efficiency is discussed during the experiment. As an experimental result,it is found that the cleaning method using high- speed air jet is an effective way to remove the particles on the smooth surface. Furthermore,F＊can be taken as a key parameter to evaluate the removal efficiency.
出处
《制造技术与机床》
北大核心
2016年第7期70-74,共5页
Manufacturing Technology & Machine Tool
关键词
干式清洗
高速气流喷射
再悬浮参数
去除效率
dry cleaning
high-speed air jet
resuspension parameter
removal efficiency
