摘要
利用多弧离子镀在硬质合金基体上制备TiN涂层,研究了N_2/Ar流量比对TiN涂层表面大颗粒分布与力学性能的影响。通过扫描电镜观察TiN涂层的表面形貌,并利用Image J图像处理软件对大颗粒的数量和尺寸进行了分析,通过自动划痕仪和纳米压痕仪对涂层的力学性能进行表征。结果表明:随着N2流量的增加,涂层表面沉积颗粒的最大直径和平均直径逐渐减小,涂层的附着力整体呈现增加趋势,显微硬度则先增大后减小。
TiN coating was deposited on the surface of cemented carbide substrate by multi-arc ion plating. The influ-ence of N2/Ar flow rate on the distribution of microparticles （MPs） and mechanical properties of TiN coating was stud-ied. The surface morphologies of TiN film were observed by scanning electron microscope. The amount and size of MPs were analyzed by ImageJ software. Scratch spectrometer and nanoindenter were used to evaluate mechanical properties of TiN coating. The results show that the maximum size and average diameter of MPs decrease with the increase of N2 flow,and the adhesion strength of TiN coating goes up,while the micro-hardness of TiN coating increases firstly and then decreases.
出处
《粉末冶金工业》
CAS
北大核心
2016年第3期44-48,共5页
Powder Metallurgy Industry
基金
四川省科技厅资助项目(15010112)
自贡市科技局项目(2015HX19)
四川理工学院科研培育项目(2014PY10)
