摘要
高质量的金属氧化物薄膜在航天航空、海洋船舶等极端环境下的关键部件有着广泛的应用需求,但传统制备技术易导致薄膜疏松多孔,产生空隙裂纹等缺陷,高功率脉冲磁控溅射技术(HiPIMS)已被证明是一种有效制备无空洞和无弧滴致密薄膜的有效方法。通过 HiPIMS 技术在不锈钢表面制备超薄致密 ZrO_(2) 薄膜,重点研究不同 O_(2)流量下耐腐蚀性能的调控规律。 通过扫描电子显微镜(SEM)、光电子能谱仪(XPS)、X 射线衍射仪(XRD)、原子力显微镜(AFM)、纳米压痕仪(Nano Test P3)、电化学设备(CS300)等对 ZrO_(2)薄膜的表面形貌、物相结构、力学性能、耐腐蚀性能等方面进行研究。研究结果显示, 在 O_(2)流量为 40 mL/ min 时,ZrO_(2) 薄膜的纳米硬度 H 最高为 26.38 GPa,弹性模量 E 为 290.9 GPa;同时,在电化学腐蚀试验中,其自腐蚀电流密度 Icorr达到 45.802 pA / cm^(2) ,与 304L 不锈钢相比降低了 4 个数量级;电化学阻抗谱(EIS)显示,随 O_(2)流量的增加,容抗弧半径、低频区阻抗值和相角均随之不断增大,进一步表明 O_(2) 流量为 40 min / mL 制备薄膜的耐腐蚀性能最优。通过 HiPIMS 技术能够制备出高质量的 ZrO_(2) 薄膜,其高耐腐蚀性对基体起到了强效的防护作用,对防腐薄膜的研究和应用具有一定参考价值。
Corrosion-resistant metal oxide films are widely used in the key parts of aerospace, ocean ships and other extreme environments, but the traditional preparation technology deposits films easily with voids and cracks, and high power impulse magnetron sputtering (HiPIMS) has proven to be an effective method of depositing dense films without voids and cracks. Ultra-thin ZrO_(2) films are prepared on stainless steel by HiPIMS. The law of variation for corrosion resistance of the films following the O_(2) flow rate is studied with scanning electron microscope (SEM), photoelectron spectrometer (XPS), X-ray diffractometer (XRD), atomic force microscope (AFM), nano-indenter (Nano Test P3) and electrochemical equipment (CS300). The results reveals that when the O_(2) flow rate is 40 mL / min, the nano-hardness H and the elastic modulus E achieve to the highest value of 26.38 GPa and 290.9 GPa respectively. Meanwhile, the film prepared under 40 mL / min O_(2) flow rate exhibits excellent corrosion resistance. The self-corrosion current density Icorr is 45.802 pA / cm^(2) , four orders of magnitude lower than that of 304L stainless steel. The EIS spectrum shows that the radius of capacitive reactance arc, the impedance value of low frequency region and the phase angle increase continuously with the increase of O_(2) flow. The strong corrosion-resistant metal oxide films can be achieved by HiPIMS, which plays an important role on protecting the stainless steel.
作者
孙丽
蒋琴
张志强
李倩
廖斌
欧阳晓平
SUN Li;JIANG Qin;ZHANG Zhiqiang;LI Qian;LIAO Bin;OUYANG Xiaoping(College of Nuclear Science and Technology,Beijing Normal University,Beijing 100875,China)
出处
《中国表面工程》
EI
CAS
CSCD
北大核心
2022年第3期203-213,共11页
China Surface Engineering
关键词
高功率脉冲磁控溅射技术
ZrO_(2)薄膜
耐腐蚀
high power impulse magnetron sputtering technology
ZrO_(2) coatings
corrosion resistance
