摘要
本文采用传统的高温固相反应法制备Ba_(0.85)Ca_(0.15)Ti_(0.9)Zr_(0.1)O_3(BCTZ)陶瓷靶材,并利用脉冲激光沉积(PLD)法,在生长有SrRuO_3底电极的SrTiO_3(100)衬底上沉积BCTZ(BCTZ/SRO/STO)薄膜。通过对其生长工艺的探索,在沉积温度780℃,氧压13 Pa,靶间距48 mm,脉冲激光频率2 Hz,激光能量200 m J的条件下可获得高择优取向、高结晶度的BCTZ薄膜。在此工艺条件下,制备不同膜厚的BCTZ薄膜。进一步利用X射线衍射仪(XRD)、原子力显微镜(AFM)、台阶仪、铁电测试仪等手段对薄膜的微观结构、厚度和铁电性能进行表征分析。结果表明,所制备薄膜的表面粗糙度随着薄膜厚度的增加而变大。薄膜的铁电性呈现出与薄膜厚度的强相关性,即随着薄膜厚度的增加,BCTZ薄膜的剩余极化值(2Pr)逐渐增大,矫顽场强度(Ec)逐渐减小。
Ba0.85Ca0.15Ti0.9Zr0.1O3（BCTZ） ceramics were prepared by the conventional high temperature solid- state reaction method. BCTZ films were deposited on a SrTiO3（STO） （100） substrate with thin SrRuO3（SRO） e- lectrode（BCTZ/SRO/STO） by pulsed laser deposition （PLD）. By exploring the growth technology, BCTZ films of high preferred orientation and high crystallinity were prepared at 780 ℃, 02 pressure of 13 Pa, target- substrate distance of 48 mm and laser frequency of 2 Hz and energy of 200 mJ. A series of BCTZ films of different thickness were obtained under such conditions. The microstructure, thickness and ferroelectric properties of films were characterized by X- ray diffraction （ XRD）, atomic force microscope （ AFM）, the step profiler and ferroelectric tester. Results show that the roughness of films increases as the thickness increases,There are strong correlations between the ferroelectric properties of films and the thickness.The remnant polarization increases as the thickness increases. The coercive field decreases as the thickness increases.
出处
《贵州大学学报（自然科学版）》
2016年第1期23-27,共5页
Journal of Guizhou University:Natural Sciences
基金
国家自然科学基金项目资助(51462003)
贵州省高层次创新型人才项目资助(20154006)
贵州省研究生卓越人才计划项目资助(2014001)
贵州省科技厅联合资金项目资助(黔科合LH字[2015]7643)
