摘要
针对带倾斜相移误差的闭合干涉图,提出一种非迭代的高精度相位提取方法.该方法用傅里叶变换估计闭合条纹的相位,并用图像分割校正相位的符号,然后利用Zernike多项式拟合确定倾斜相移量,最后用最小二乘拟合得到高精度相位.数值模拟结果表明:该方法的相位提取误差随着干涉图中条纹根数的增多而减小;当干涉图中条纹根数为4.5时,倾斜相移的估计误差为0.37%.实验结果表明该方法的残余误差均方根值为0.121 7rad.该方法精度高,且无需迭代计算,可应用于相移干涉测量.
A non-iterative method was proposed to extract the phase from closed interferograms with tiltshift errors.The proposed method estimates the phase of closed interferogram by Fourier transform,corrects the sign ambiguity of phase by image segmentation,and determines the tilt-shift plane by Zernike polynomials fitting.Finally the phase is extracted accurately by least square fitting.Simulation result shows that the residual phase error of the proposed method decreases with the increasing of the number of fringes in interferograms.When the closed interferograms have 4.5fringes,the average estimation error of tilt shift is 0.37%.Experimental result shows that the root mean square of the residual phase error is only 0.121 7rad.The proposed method is accurate and non-iterative,can be used in phase shifting interferometry.
出处
《光子学报》
EI
CAS
CSCD
北大核心
2016年第2期1-6,共6页
Acta Photonica Sinica
基金
The National Natural Science Foundation of China(No.61205163)
Marie Curie International Incoming Fellowships(No.301807)by the Research Executive Agency of the European Commission
关键词
相移干涉测量
条纹分析
傅里叶变换
闭合干涉图
倾斜相移误差
Phase shifting interferometry
Fringe pattern analysis
Fourier transform method
Closed interferogram
Tilt-shift error
