摘要
铟锡氧化物(ITO)薄膜是一种光电性能优良的二元透明导电氧化物(TCO)薄膜,随着其在应用领域的不断拓展,其各项性能需要进一步提升。向ITO薄膜中掺入高价金属元素是一种有效的改性方法,该方法已经逐步成为研究热点。
Indium-tin oxide（ITO） thin film is a kind of binary transparent conducting oxide（TCO） films with excellent optoelectric properties. The overall performance of ITO film should be furtherly improved as new applications extending continuously. High-valence metal element doping techniques can effectively enhance the properties of ITO film, and thus becomes a research focus.
出处
《热加工工艺》
CSCD
北大核心
2016年第2期14-17,共4页
Hot Working Technology
关键词
透明导电氧化物
ITO薄膜
掺杂
transparent conducting oxide
ITO thin films
doping
