摘要
为检测瞬态波前的三维分布,提出了一种共光路结构的剪切干涉测试系统。该系统使用棋盘光栅与光阑,将待测波前分解为四支互相错位的波前,这些波前两两相干,最终叠加形成一幅高载频的干涉图。根据光强传输方程以及傅里叶光学理论,建立了剪切干涉测试系统的理论模型,采用傅里叶变换算法提取待测波前。提出了一种剪切量标定算法,通过讨论线性载频的影响因素与光栅的衍射效率,给出了棋盘光栅的具体设计参数。实验搭建了瞬态波前检测装置,实现了自动化高精度测量,波面检测结果的峰谷(PV)值、均方根(RMS)值以及Zernike拟合系数均与SID4波前探测器所测波面结果一致。因此采用该技术能够实现瞬态波前检测。
In order to detect the three-dimensional distribution of transient wavefront, a shearing interferometric measurement system with common path configuration is proposed. The system uses a chessboard grating and aperture to divide the wavefront under test into four replicas with shear. Each two of the replicas are coherent to form an interferogram with high carrier frequency. According to the transport of intensity equation and Fourier optics, the theoretical model of shearing interferometric measurement system is established and the wavefront under test is reconstructed by Fourier transform algorithm. A calibration method of shear is proposed. The design of chessboard grating is given by discussing linear carrier frequency and diffraction efficiency of the grating. Experimentally the proposed system is applied to measure transient wavefront, and automatic measurement with high precision is achieved. Peak-to-valley（PV） value, root-mean-square（RMS） value and Zernike fitting coefficient of the measured result are in good agreement with those obtained by SID4 wavefront sensor. This system can be applied to transient wavefront measurement.
出处
《激光与光电子学进展》
CSCD
北大核心
2015年第12期99-105,共7页
Laser & Optoelectronics Progress
基金
国家自然科学基金(U1231111)
关键词
测量
四波横向剪切干涉
瞬态波前检测
棋盘光栅
剪切量标定
measurement
four-wave lateral shear interferometry
transient wavefront measurement
chessboard grating
calibration of shear
