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干涉法在光栅波前检测中的应用研究 被引量:3

Research on Application of Interference Method for Testing Grating Wavefront
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摘要 主要针对凹面衍射光栅波前检测方法进行研究。实验光路的搭建基于泰曼干涉仪检测原理,针对凹面光栅检测进行相应的改进,成功获得凹面光栅零级和一级干涉条纹,从而证明了用干涉法检验凹面光栅衍射波前的可行性,为凹面光栅的加工质量检测提供了理论依据。 In this paper,experimental optical structures have been finished based on the Twyman interferometer for testing concave grating with improvements.Zero and one order interference fringe have been obtained successfully.Wave front test of concave diffraction grating by interference is proved to be feasible,providing the quality basis of processing inspection of the concave grating.
出处 《长春理工大学学报(自然科学版)》 2011年第2期5-7,共3页 Journal of Changchun University of Science and Technology(Natural Science Edition)
关键词 衍射光栅 凹面光栅 波前检测 波前像差 diffraction grating concave grating wavefront testing wavefront aberration
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参考文献4

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二级参考文献2

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共引文献10

同被引文献27

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