摘要
随着晶体硅太阳电池技术的不断发展,硅片的厚度不断降低,电池表面钝化对提高太阳能电池转化效率变得尤为重要。本文介绍了表面钝化膜在晶体硅太阳电池中的应用,以及几种晶体硅电池表面钝化方法,包括等离子体增强化学气相沉积法、氢化非晶硅、热氧化法、原子层沉积法以及叠层钝化,并分别介绍了它们在应用上的优缺点。分析了制备钝化膜过程中存在的问题,并提出了相应措施及发展趋势。表面钝化技术是提高晶体硅电池转换效率最有效的手段之一,今后晶体硅电池表面钝化技术仍将是国内和国际研究的热点之一。
With the development of crystalline silicon solar cell technology and the reduction of solar cell thickness, the technology of cell surface passivation becomes more important to improve solar cell conversion efficiency. Surface passivation membrane as well as the role played by the membrane crystalline silicon solar cells was introduced. Meanwhile, several kinds of passivation methods were analyzed, including PECVD, hydrogenated a-Si, thermally grown and atomic layer deposition. Advantages and disadvantages of these passivation methods were discussed. Existing problems in the process of cell surface passivation were presented, and the corresponding measures and development trend were put forward. Surface passivation is one of the effective methods to increase the conversion efficiency of the crystalline silicon solar cells, thus still the global research hot spot on the way forward.
出处
《材料科学与工程学报》
CAS
CSCD
北大核心
2015年第4期613-618,共6页
Journal of Materials Science and Engineering
基金
国家自然科学基金资助项目(11374204)
上海市"曙光计划"资助项目(13SG52)
上海市科委重点资助项目(12JC1404400
14520501000)
关键词
太阳电池
表面钝化
转化效率
钝化膜
solar cell
surface passivation
conversion efficiency
passivation film
