摘要
微机电系统动态测试主要是对微结构的微小位移和变形进行测试研究,其结果直接影响微结构的运动特征和功能,因此在微机电的发展过程中非常重要。随着MEMS的迅速发展,对测试技术不断提出新的要求,尤其是MEMS动态测试面临前所未有的挑战,为此对国内学者在MEMS动态测试技术方面的研究成果进行了归纳总结,分析了其应用场合和测试范围,其中非接触式光学测试方法在MEMS动态测试中备受关注,多种方法相结合的综合测试技术成为MEMS动态测试技术的主要发展方向。
Micro displacement and deformations are mainly measured in dynamics testing which is very important in MEMS for the motion characteristic and function of microstructure. Now MEMS develops very quickly, and dynamic testing technology must keep up the pace. In the paper dynamic testing techniques of MEMS researched in home are summarized. Its application and testing range of various technologies are analyzed. Results show that noncontact optic testing technique is getting more attention and the comprehensive testing will be the main development direction of dynamic testing technology of Microstructure in MEMS.
出处
《机电工程技术》
2015年第4期57-59,共3页
Mechanical & Electrical Engineering Technology
基金
国家自然科学基金资助项目(编号:51105077)
广东省精密装备与制造技术重点实验室开放基金资助项目
关键词
MEMS
动态测试
光学测试
综合测试
micro electro mechanical systems （MEMS）
dynamic testing
optic testing
comprehensive testing technology
